| Porous silicon bulk micromachining for thermally isolated membrane formation C Dücsö, E Vazsonyi, M Adam, I Szabó, I Bársony, JGE Gardeniers, ... Sensors and Actuators A: Physical 60 (1-3), 235-239, 1997 | 127 | 1997 |
| Deposition of tin oxide into porous silicon by atomic layer epitaxy C Dücsö, NQ Khanh, Z Horváth, I Bársony, M Utriainen, S Lehto, ... Journal of the Electrochemical Society 143 (2), 683, 1996 | 116 | 1996 |
| Nucleation and growth modes of ALD ZnO Z Baji, Z Labadi, ZE Horvath, G Molnár, J Volk, I Bársony, P Barna Crystal growth & design 12 (11), 5615-5620, 2012 | 102 | 2012 |
| Efficiency improvement by porous silicon coating of multicrystalline solar cells A Krotkus, K Grigoras, V Pačebutas, I Barsony, E Vazsonyi, M Fried, ... Solar Energy Materials and Solar Cells 45 (3), 267-273, 1997 | 90 | 1997 |
| Thermal characterisation of a direction dependent flow sensor P Fürjes, G Légrádi, C Dücső, A Aszódi, I Bársony Sensors and Actuators A: Physical 115 (2-3), 417-423, 2004 | 88 | 2004 |
| Characterization of different porous silicon structures by spectroscopic ellipsometry M Fried, T Lohner, O Polgar, P Petrik, E Vazsonyi, I Barsony, JP Piel, ... Thin Solid Films 276 (1-2), 223-227, 1996 | 72 | 1996 |
| Highly uniform epitaxial ZnO nanorod arrays for nanopiezotronics J Volk, T Nagata, R Erdélyi, I Bársony, AL Tóth, IE Lukács, Z Czigány, ... Nanoscale research letters 4, 699-704, 2009 | 67 | 2009 |
| Effects of the elastic cover on tactile sensor arrays G Vásárhelyi, M Adám, E Vázsonyi, I Bársony, C Dücső Sensors and Actuators A: Physical 132 (1), 245-251, 2006 | 67 | 2006 |
| Thermal characterisation of micro-hotplates used in sensor structures P Fürjes, C Dücső, M Ádám, J Zettner, I Bársony Superlattices and Microstructures 35 (3-6), 455-464, 2004 | 59 | 2004 |
| Ellipsometry of Silica nanoparticulate Langmuir− Blodgett films for the verification of the validity of effective medium approximations N Nagy, A Deák, Z Hórvölgyi, M Fried, A Agod, I Bársony Langmuir 22 (20), 8416-8423, 2006 | 58 | 2006 |
| Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors C Dücso, M Ádám, P Fürjes, M Hirschfelder, S Kulinyi, I Bársony Sensors and Actuators B: Chemical 95 (1-3), 189-194, 2003 | 55 | 2003 |
| Regular ZnO nanopillar arrays by nanosphere photolithography Z Szabó, J Volk, E Fülöp, A Deák, I Bársony Photonics and Nanostructures-Fundamentals and Applications 11 (1), 1-7, 2013 | 53 | 2013 |
| Characterization of an integrable single-crystalline 3-D tactile sensor G Vásárhelyi, M Ádám, É Vázsonyi, Z Vízváry, A Kis, I Bársony, C Ducso IEEE Sensors journal 6 (4), 928-934, 2006 | 53 | 2006 |
| Comparison of algorithms used for evaluation of ellipsometric measurements random search, genetic algorithms, simulated annealing and hill climbing graph-searches O Polgár, M Fried, T Lohner, I Bársony Surface Science 457 (1-2), 157-177, 2000 | 48 | 2000 |
| Optical and electrical characterization of aluminium doped ZnO layers C Major, A Nemeth, G Radnoczi, Z Czigany, M Fried, Z Labadi, I Barsony Applied Surface Science 255 (21), 8907-8912, 2009 | 47 | 2009 |
| Three-dimensional force sensor by novel alkaline etching technique É Vázsonyi, M Ádám, C Dücső, Z Vízváry, AL Tóth, I Bársony Sensors and Actuators A: Physical 123, 620-626, 2005 | 46 | 2005 |
| Large area self-assembled masking for photonic applications N Nagy, AE Pap, E Horváth, J Volk, I Bársony, A Deák, Z Hórvölgyi Applied Physics Letters 89 (6), 2006 | 44 | 2006 |
| Porous silicon multilayer stack for sensitive refractive index determination of pure solvents J Volk, T Le Grand, I Bársony, J Gombkötő, JJ Ramsden Journal of Physics D: Applied Physics 38 (8), 1313, 2005 | 44 | 2005 |
| CMOS integrated tactile sensor array by porous Si bulk micromachining M Ádám, T Mohácsy, P Jónás, C Dücső, É Vázsonyi, I Bársony Sensors and Actuators A: Physical 142 (1), 192-195, 2008 | 43 | 2008 |
| Single step deposition of different morphology ZnO gas sensing films Á Németh, E Horváth, Z Lábadi, L Fedák, I Bársony Sensors and Actuators B: Chemical 127 (1), 157-160, 2007 | 43 | 2007 |
