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David J. Michalak
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Qubits made by advanced semiconductor manufacturing
AMJ Zwerver, T Krähenmann, TF Watson, L Lampert, HC George, ...
Nature Electronics 5 (3), 184-190, 2022
2162022
Scalable quantum circuit and control for a superconducting surface code
R Versluis, S Poletto, N Khammassi, B Tarasinski, N Haider, DJ Michalak, ...
Physical Review Applied 8 (3), 034021, 2017
2062017
Nanopatterning Si (111) surfaces as a selective surface-chemistry route
DJ Michalak, SR Amy, D Aureau, M Dai, A Estève, YJ Chabal
Nature materials 9 (3), 266-271, 2010
1722010
Dielectric layers having ordered elongate pores
DJ Michalak, RL Bristol, A Sengupta, MJ Kobrinsky
US Patent App. 14/108,255, 2015
1542015
High-resolution X-ray photoelectron spectroscopic studies of alkylated silicon (111) surfaces
LJ Webb, EJ Nemanick, JS Biteen, DW Knapp, DJ Michalak, MC Traub, ...
The Journal of Physical Chemistry B 109 (9), 3930-3937, 2005
1272005
Chemical and electrical passivation of single-crystal silicon (100) surfaces through a two-step chlorination/alkylation process
EJ Nemanick, PT Hurley, LJ Webb, DW Knapp, DJ Michalak, ...
The Journal of Physical Chemistry B 110 (30), 14770-14778, 2006
1232006
Transmission infrared spectroscopy of methyl-and ethyl-terminated silicon (111) surfaces
LJ Webb, S Rivillon, DJ Michalak, YJ Chabal, NS Lewis
The Journal of Physical Chemistry B 110 (14), 7349-7356, 2006
1092006
Infrared spectroscopic investigation of the reaction of hydrogen-terminated,(111)-oriented, silicon surfaces with liquid methanol
DJ Michalak, S Rivillon, YJ Chabal, A Esteve, NS Lewis
The Journal of Physical Chemistry B 110 (41), 20426-20434, 2006
892006
Chlorination of hydrogen-terminated silicon (111) surfaces
S Rivillon, YJ Chabal, LJ Webb, DJ Michalak, NS Lewis, MD Halls, ...
Journal of Vacuum Science & Technology A 23 (4), 1100-1106, 2005
882005
Quantum well stacks for quantum dot devices
P Amin, NK Thomas, JS Clarke, JM Torres, R Pillarisetty, HC George, ...
US Patent 10,763,347, 2020
682020
Porosity scaling strategies for low-k films
DJ Michalak, JM Blackwell, JM Torres, A Sengupta, LE Kreno, JS Clarke, ...
Journal of Materials Research 30 (22), 3363-3385, 2015
672015
General method for extracting the quantum efficiency of dispersive qubit readout in circuit QED
CC Bultink, B Tarasinski, N Haandbæk, S Poletto, N Haider, DJ Michalak, ...
Applied Physics Letters 112 (9), 2018
662018
High-resolution soft X-ray photoelectron spectroscopic studies and scanning auger microscopy studies of the air oxidation of alkylated silicon (111) surfaces
LJ Webb, DJ Michalak, JS Biteen, BS Brunschwig, ASY Chan, DW Knapp, ...
The Journal of Physical Chemistry B 110 (46), 23450-23459, 2006
662006
Defect structure and electronic properties of SiOC: H films used for back end of line dielectrics
TA Pomorski, BC Bittel, PM Lenahan, E Mays, C Ege, J Bielefeld, ...
Journal of Applied Physics 115 (23), 2014
652014
Electrochemical and Electrical Behavior of (111)-Oriented Si Surfaces Alkoxylated through Oxidative Activation of Si− H Bonds
JA Haber, I Lauermann, D Michalak, TP Vaid, NS Lewis
The Journal of Physical Chemistry B 104 (43), 9947-9950, 2000
652000
Surface etching, chemical modification and characterization of silicon nitride and silicon oxide—selective functionalization of Si3N4 and SiO2
LH Liu, DJ Michalak, TP Chopra, SP Pujari, W Cabrera, D Dick, JF Veyan, ...
Journal of Physics: Condensed Matter 28 (9), 094014, 2016
642016
Investigation of the chemical purity of silicon surfaces reacted with liquid methanol
DJ Michalak, SR Amy, A Esteve, YJ Chabal
The Journal of Physical Chemistry C 112 (31), 11907-11919, 2008
622008
Quantum dot devices with modulation doped stacks
R Pillarisetty, VH Le, JM Roberts, JS Clarke, ZR Yoscovits, DJ Michalak
US Patent 10,763,349, 2020
602020
Mechanical properties of high porosity low-k dielectric nano-films determined by Brillouin light scattering
S Bailey, E Mays, DJ Michalak, R Chebiam, S King, R Sooryakumar
Journal of Physics D: Applied Physics 46 (4), 045308, 2012
572012
Quantum circuit assemblies with triaxial cables
L Lampert, R Pillarisetty, NK Thomas, HC George, JM Roberts, ...
US Patent 10,565,515, 2020
562020
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