Qubits made by advanced semiconductor manufacturing AMJ Zwerver, T Krähenmann, TF Watson, L Lampert, HC George, ... Nature Electronics 5 (3), 184-190, 2022 | 305 | 2022 |
Scalable quantum circuit and control for a superconducting surface code R Versluis, S Poletto, N Khammassi, B Tarasinski, N Haider, DJ Michalak, ... Physical Review Applied 8 (3), 034021, 2017 | 225 | 2017 |
Nanopatterning Si (111) surfaces as a selective surface-chemistry route DJ Michalak, SR Amy, D Aureau, M Dai, A Estève, YJ Chabal Nature materials 9 (3), 266-271, 2010 | 175 | 2010 |
Dielectric layers having ordered elongate pores DJ Michalak, RL Bristol, A Sengupta, MJ Kobrinsky US Patent App. 14/108,255, 2015 | 157 | 2015 |
Chemical and electrical passivation of single-crystal silicon (100) surfaces through a two-step chlorination/alkylation process EJ Nemanick, PT Hurley, LJ Webb, DW Knapp, DJ Michalak, ... The Journal of Physical Chemistry B 110 (30), 14770-14778, 2006 | 126 | 2006 |
High-resolution X-ray photoelectron spectroscopic studies of alkylated silicon (111) surfaces LJ Webb, EJ Nemanick, JS Biteen, DW Knapp, DJ Michalak, MC Traub, ... The Journal of Physical Chemistry B 109 (9), 3930-3937, 2005 | 126 | 2005 |
Transmission infrared spectroscopy of methyl-and ethyl-terminated silicon (111) surfaces LJ Webb, S Rivillon, DJ Michalak, YJ Chabal, NS Lewis The Journal of Physical Chemistry B 110 (14), 7349-7356, 2006 | 113 | 2006 |
Infrared spectroscopic investigation of the reaction of hydrogen-terminated,(111)-oriented, silicon surfaces with liquid methanol DJ Michalak, S Rivillon, YJ Chabal, A Esteve, NS Lewis The Journal of Physical Chemistry B 110 (41), 20426-20434, 2006 | 92 | 2006 |
Chlorination of hydrogen-terminated silicon (111) surfaces S Rivillon, YJ Chabal, LJ Webb, DJ Michalak, NS Lewis, MD Halls, ... Journal of Vacuum Science & Technology A 23 (4), 1100-1106, 2005 | 90 | 2005 |
General method for extracting the quantum efficiency of dispersive qubit readout in circuit QED CC Bultink, B Tarasinski, N Haandbæk, S Poletto, N Haider, DJ Michalak, ... Applied Physics Letters 112 (9), 2018 | 79 | 2018 |
Porosity scaling strategies for low-k films DJ Michalak, JM Blackwell, JM Torres, A Sengupta, LE Kreno, JS Clarke, ... Journal of Materials Research 30 (22), 3363-3385, 2015 | 73 | 2015 |
Quantum well stacks for quantum dot devices P Amin, NK Thomas, JS Clarke, JM Torres, R Pillarisetty, HC George, ... US Patent 10,763,347, 2020 | 70 | 2020 |
Defect structure and electronic properties of SiOC: H films used for back end of line dielectrics TA Pomorski, BC Bittel, PM Lenahan, E Mays, C Ege, J Bielefeld, ... Journal of Applied Physics 115 (23), 2014 | 69 | 2014 |
Surface etching, chemical modification and characterization of silicon nitride and silicon oxide—selective functionalization of Si3N4 and SiO2 LH Liu, DJ Michalak, TP Chopra, SP Pujari, W Cabrera, D Dick, JF Veyan, ... Journal of Physics: Condensed Matter 28 (9), 094014, 2016 | 67 | 2016 |
High-resolution soft X-ray photoelectron spectroscopic studies and scanning auger microscopy studies of the air oxidation of alkylated silicon (111) surfaces LJ Webb, DJ Michalak, JS Biteen, BS Brunschwig, ASY Chan, DW Knapp, ... The Journal of Physical Chemistry B 110 (46), 23450-23459, 2006 | 66 | 2006 |
Electrochemical and Electrical Behavior of (111)-Oriented Si Surfaces Alkoxylated through Oxidative Activation of Si− H Bonds JA Haber, I Lauermann, D Michalak, TP Vaid, NS Lewis The Journal of Physical Chemistry B 104 (43), 9947-9950, 2000 | 65 | 2000 |
Investigation of the chemical purity of silicon surfaces reacted with liquid methanol DJ Michalak, SR Amy, A Esteve, YJ Chabal The Journal of Physical Chemistry C 112 (31), 11907-11919, 2008 | 63 | 2008 |
Quantum circuit assemblies with triaxial cables L Lampert, R Pillarisetty, NK Thomas, HC George, JM Roberts, ... US Patent 10,565,515, 2020 | 62 | 2020 |
Quantum dot devices with modulation doped stacks R Pillarisetty, VH Le, JM Roberts, JS Clarke, ZR Yoscovits, DJ Michalak US Patent 10,763,349, 2020 | 61 | 2020 |
Mechanical properties of high porosity low-k dielectric nano-films determined by Brillouin light scattering S Bailey, E Mays, DJ Michalak, R Chebiam, S King, R Sooryakumar Journal of Physics D: Applied Physics 46 (4), 045308, 2012 | 59 | 2012 |