Követés
Stoyan Nihtianov
Stoyan Nihtianov
Assoc. professor of Industrial Electronic Instrumentation, TU Delft
E-mail megerősítve itt: tudelft.nl
Cím
Hivatkozott rá
Hivatkozott rá
Év
Comparative study of silicon-based ultraviolet photodetectors
L Shi, S Nihtianov
IEEE Sensors Journal 12 (7), 2453-2459, 2012
1822012
Design strategies for eddy-current displacement sensor systems: Review and recommendations
MR Nabavi, SN Nihtianov
IEEE Sensors Journal 12 (12), 3346-3355, 2012
1542012
A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
S Xia, K Makinwa, S Nihtianov
2012 IEEE International Solid-State Circuits Conference, 198-200, 2012
1332012
Advances in capacitive, eddy current, and magnetic displacement sensors and corresponding interfaces
B George, Z Tan, S Nihtianov
IEEE Transactions on Industrial Electronics 64 (12), 9595-9607, 2017
1172017
Lithographic apparatus and device manufacturing method
TPM Cadee, JJ Ottens, JJSM Mertens, FE De Jong, K Goorman, ...
US Patent 7,304,715, 2007
1172007
Lithographic apparatus and device manufacturing method having liquid evaporation control
TPM Cadee, JHW Jacobs, N Ten Kate, ER Loopstra, ALHJ Vermeer, ...
US Patent 7,804,575, 2010
1082010
Smart sensors and MEMS: Intelligent sensing devices and microsystems for industrial applications
S Nihtianov, A Luque
Woodhead Publishing, 2018
104*2018
An Energy-Efficient 3.7-nV/ Hz Bridge Readout IC With a Stable Bridge Offset Compensation Scheme
H Jiang, S Nihtianov, KAA Makinwa
IEEE Journal of Solid-State Circuits 54 (3), 856-864, 2018
792018
Eddy-current sensor interface for advanced industrial applications
MR Nabavi, S Nihtianov
IEEE Transactions on Industrial Electronics 58 (9), 4414-4423, 2010
732010
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
F Sarubbi, LK Nanver, TLM Scholtes, SN Nihtianov, F Scholze
ESSDERC 2008-38th European Solid-State Device Research Conference, 278-281, 2008
632008
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
SN al.
US Patent 8426831 B2, 2013
58*2013
Sensor and lithographic apparatus
S Nihtianov, HV Kok, MGD Wehrens
US Patent 9,331,117, 2016
542016
Measuring in the subnanometer range: Capacitive and eddy current nanodisplacement sensors
S Nihtianov
IEEE Industrial Electronics Magazine 8 (1), 6-15, 2014
542014
Capacitive-sensor interface with high accuracy and stability
R Nojdelov, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 58 (5), 1633-1639, 2009
482009
A novel interface for eddy current displacement sensors
MR Nabavi, S Nihtianov
IEEE transactions on instrumentation and measurement 58 (5), 1623-1632, 2009
472009
An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation
MR Nabavi, MAP Pertijs, S Nihtianov
IEEE journal of solid-state circuits 48 (11), 2868-2881, 2013
462013
A precision capacitance-to-digital converter with 16.7-bit ENOB and 7.5-ppm/° C thermal drift
R Yang, MAP Pertijs, S Nihtianov
IEEE Journal of Solid-State Circuits 52 (11), 3018-3031, 2017
382017
An interface circuit for RC impedance sensors with a relaxation oscillator
SN Nihtianov, GP Shterev, B Iliev, GCM Meijer
IEEE Transactions on Instrumentation and Measurement 50 (6), 1563-1567, 2001
382001
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
S Nihtianov, AJ Van Der Sijs, B Moest, PWJM Kemper, MAM Haast, ...
US Patent 8,138,485, 2012
372012
High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application
L Shi, F Sarubbi, SN Nihtianov, LK Nanver, TLM Scholtes, F Scholze
2009 35th annual conference of IEEE industrial electronics, 1877-1882, 2009
372009
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