Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ... Journal of Vacuum Science & Technology B 35 (6), 2017 | 99 | 2017 |
Formation of polymer and nanoparticle doped polymer minirods by use of the microsegmented flow principle GA Groß, C Hamann, PM Günther, JM Köhler Chemical Engineering & Technology: Industrial Chemistry‐Plant Equipment …, 2007 | 49 | 2007 |
Pattern-generation and pattern-transfer for single-digit nano devices IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 47 | 2016 |
Large area fast-AFM scanning with active “Quattro” cantilever arrays A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 37 | 2016 |
Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography Z Durrani, M Jones, F Abualnaja, C Wang, M Kaestner, S Lenk, C Lenk, ... Journal of Applied Physics 124 (14), 2018 | 36 | 2018 |
Automated synchrogram analysis applied to heartbeat and reconstructed respiration C Hamann, RP Bartsch, AY Schumann, T Penzel, S Havlin, ... Chaos: An Interdisciplinary Journal of Nonlinear Science 19 (1), 2009 | 35 | 2009 |
Field emission from diamond nanotips for scanning probe lithography M Hofmann, C Lenk, T Ivanov, IW Rangelow, A Reum, A Ahmad, M Holz, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 33 | 2018 |
Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 30 | 2018 |
Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 25 | 2016 |
Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode C Lenk, S Lenk, M Holz, E Guliyev, M Hofmann, T Ivanov, IW Rangelow, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 24 | 2018 |
Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching C Lenk, M Hofmann, S Lenk, M Kaestner, T Ivanov, Y Krivoshapkina, ... Microelectronic Engineering 192, 77-82, 2018 | 20 | 2018 |
Field-emission scanning probe lithography tool for 150 mm wafer M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 19 | 2018 |
Low-energy electron exposure of ultrathin polymer films with scanning probe lithography Y Krivoshapkina, M Kaestner, C Lenk, S Lenk, IW Rangelow Microelectronic Engineering 177, 78-86, 2017 | 19 | 2017 |
2D simulation of Fowler-Nordheim electron emission in scanning probe lithography S Lenk, M Kaestner, C Lenk, T Angelov, Y Krivoshapkina, IW Rangelow J Nanomater Mol Nanotechnol 5 (6), 1000201, 2016 | 19 | 2016 |
Neuromorphic acoustic sensing using an adaptive microelectromechanical cochlea with integrated feedback C Lenk, P Hövel, K Ved, S Durstewitz, T Meurer, T Fritsch, A Männchen, ... Nature Electronics 6 (5), 370-380, 2023 | 14 | 2023 |
Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions IW Rangelow, C Lenk, M Hofmann, S Lenk, T Ivanov, A Ahmad, ... Novel Patterning Technologies 2018 10584, 13-25, 2018 | 14 | 2018 |
Identification of response classes from heavy metal‐tolerant soil microbial communities by highly resolved concentration‐dependent screenings in a microfluidic system D Kürsten, F Möller, GA Gross, C Lenk, N Visaveliya, T Schüler, JM Köhler Methods in Ecology and Evolution 6 (5), 600-609, 2015 | 14 | 2015 |
Scanning probe-based high-accuracy overlay alignment concept for lithography applications V Ishchuk, E Guliyev, C Aydogan, I Buliev, M Kaestner, T Ivanov, A Ahmad, ... Applied Physics A 123, 1-12, 2017 | 13 | 2017 |
Simulation of field emission from volcano-gated tips for scanning probe lithography S Lenk, M Kaestner, C Lenk, IW Rangelow Microelectronic Engineering 177, 19-24, 2017 | 12 | 2017 |
Enabling adaptive and enhanced acoustic sensing using nonlinear dynamics C Lenk, L Seeber, M Ziegler, P Hövel, S Gutschmidt 2020 IEEE International Symposium on Circuits and Systems (ISCAS), 1-4, 2020 | 10 | 2020 |