Development of hafnium based high-k materials—A review JH Choi, Y Mao, JP Chang
Materials Science and Engineering: R: Reports 72 (6), 97-136, 2011
606 2011 Lecture notes on principles of plasma processing FF Chen, JP Chang
Springer Science & Business Media, 2012
361 2012 Infrared spectroscopic analysis of the interface structure of thermally oxidized silicon KT Queeney, MK Weldon, JP Chang, YJ Chabal, AB Gurevich, J Sapjeta, ...
Journal of Applied Physics 87 (3), 1322-1330, 2000
352 2000 Controlled nano-doping of ultra thin films JP Chang, TT Van, T Chiang, C Deshpandey, K Lesser
US Patent 7,544,398, 2009
324 2009 Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy JP Chang, ML Green, VM Donnelly, RL Opila, J Eng Jr, J Sapjeta, ...
Journal of Applied Physics 87 (9), 4449-4455, 2000
324 2000 Dielectric property and thermal stability of on silicon YS Lin, R Puthenkovilakam, JP Chang
Applied physics letters 81 (11), 2041-2043, 2002
319 2002 A study of the synthetic methods and properties of graphenes CNR Rao, KS Subrahmanyam, HSSR Matte, B Abdulhakeem, ...
Science and Technology of Advanced Materials 11 (5), 054502, 2010
227 2010 Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC CM Tanner, YC Perng, C Frewin, SE Saddow, JP Chang
Applied Physics Letters 91 (20), 2007
201 2007 Kinetic study of low energy argon ion-enhanced plasma etching of polysilicon with atomic/molecular chlorine JP Chang, JC Arnold, GCH Zau, HS Shin, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 15 (4 …, 1997
190 1997 Kinetic study of low energy ion-enhanced polysilicon etching using Cl, Cl2 , and Cl+ beam scattering JP Chang, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 15 (3 …, 1997
186 1997 Physics of high-pressure helium and argon radio-frequency plasmas M Moravej, X Yang, GR Nowling, JP Chang, RF Hicks, SE Babayan
Journal of applied physics 96 (12), 7011-7017, 2004
176 2004 In situ control of atomic-scale Si layer with huge strain in the nanoheterostructure NiSi/Si/NiSi through point contact reaction KC Lu, WW Wu, HW Wu, CM Tanner, JP Chang, LJ Chen, KN Tu
Nano letters 7 (8), 2389-2394, 2007
162 2007 Active Layer-Incorporated, Spectrally Tuned Au/SiO2 Core/Shell Nanorod-Based Light Trapping for Organic Photovoltaics V Jankovic, Y Yang, J You, L Dou, Y Liu, P Cheung, JP Chang, Y Yang
ACS nano 7 (5), 3815-3822, 2013
160 2013 Patterning and templating for nanoelectronics K Galatsis, KL Wang, M Ozkan, CS Ozkan, Y Huang, JP Chang, ...
Advanced Materials 22 (6), 769-778, 2010
155 2010 Method for depositing a coating having a relatively high dielectric constant onto a substrate J Chang, YS Lin, A Kepten, M Sendler, S Levy, R Bloom
US Patent 6,884,719, 2005
153 2005 Dielectric property and conduction mechanism of ultrathin zirconium oxide films JP Chang, YS Lin
Applied physics letters 79 (22), 3666-3668, 2001
152 2001 Synthesis and luminescence properties of erbium-doped Y2O3 nanotubes Y Mao, JY Huang, R Ostroumov, KL Wang, JP Chang
The Journal of Physical Chemistry C 112 (7), 2278-2285, 2008
148 2008 Luminescence of Nanocrystalline Erbium‐Doped Yttria Y Mao, T Tran, X Guo, JY Huang, CK Shih, KL Wang, JP Chang
Advanced Functional Materials 19 (5), 748-754, 2009
145 2009 Plasma-surface kinetics and feature profile evolution in chlorine etching of polysilicon JP Chang, AP Mahorowala, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (1 …, 1998
140 1998 Mechanical shuttling of linear motor-molecules in condensed phases on solid substrates TJ Huang, HR Tseng, L Sha, W Lu, B Brough, AH Flood, BD Yu, ...
Nano Letters 4 (11), 2065-2071, 2004
138 2004