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Benedek Horváth
Benedek Horváth
Wigner Research Centre for Physics
Verified email at wigner.mta.hu
Title
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Cited by
Year
The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures
B Horváth, M Daksha, I Korolov, A Derzsi, J Schulze
Plasma Sources Sci. Technol 26 (12), 124001, 2017
732017
The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas
B Horváth, J Schulze, Z Donkó, A Derzsi
Journal of Physics D: Applied Physics 51 (35), 355204, 2018
602018
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Z Donkó, A Derzsi, M Vass, B Horváth, S Wilczek, B Hartmann, ...
Plasma Sources Science and Technology 30 (9), 095017, 2021
432021
Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms
A Derzsi, B Horváth, Z Donkó, J Schulze
Plasma Sources Science and Technology 29 (7), 074001, 2020
192020
Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms
A Derzsi, B Horváth, I Korolov, Z Donkó, J Schulze
Journal of Applied Physics 126 (4), 2019
142019
Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon
B Horváth, A Derzsi, J Schulze, I Korolov, P Hartmann, Z Donkó
Plasma Sources Science and Technology 29 (5), 055002, 2020
122020
Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results
A Derzsi, P Hartmann, M Vass, B Horváth, M Gyulai, I Korolov, J Schulze, ...
Plasma Sources Science and Technology 31 (8), 085009, 2022
62022
The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas
B Horváth, Z Donkó, J Schulze, A Derzsi
Plasma Sources Science and Technology 31 (4), 045025, 2022
42022
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
K Noesges, M Klich, A Derzsi, B Horváth, J Schulze, RP Brinkmann, ...
Plasma Sources Science and Technology 32 (8), 085008, 2023
12023
Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures
M Vass, S Wilczek, A Derzsi, B Horváth, P Hartmann, Z Donkó
Plasma Sources Science and Technology 31 (4), 045017, 2022
12022
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
A Derzsi, M Vass, R Masheyeva, B Horvath, Z Donko, P Hartmann
Plasma Sources Science and Technology 33 (2), 025005, 2024
2024
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
CW Park, B Horváth, A Derzsi, J Schulze, JH Kim, Z Donkó, HC Lee
Plasma Sources Science and Technology 32 (11), 115003, 2023
2023
Electron power absorption mode transitions in low-pressure capacitively coupled plasmas in gas mixtures
A Derzsi, M Vass, R Masheyeva, B Horvath, I Korolov, J Schulze, Z Donkó, ...
APS Annual Gaseous Electronics Meeting Abstracts, ER4. 001, 2023
2023
Electron power absorption in capacitively coupled plasmas operated in gas mixtures containing oxygen
B Horvath, A Derzsi, P Hartmann, M Vass, J Schulze, I Korolov, M Gyulai, ...
APS Annual Gaseous Electronics Meeting Abstracts, HT4. 039, 2022
2022
Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas
A Derzsi, P Hartmann, M Vass, B Horvath, M Gyulai, I Korolov, J Schulze, ...
APS Annual Gaseous Electronics Meeting Abstracts, ER4. 001, 2022
2022
The effect of secondary electrons in low-pressure capacitively coupled oxygen plasmas
B Horvath, Z Donko, J Schulze, A Derzsi
APS Annual Gaseous Electronics Meeting Abstracts, JW61. 003, 2021
2021
The effects of surface processes on the plasma parameters in low-pressure multi-frequency capacitive discharges
A Derzsi, B Horvath, Z Donko, J Schulze
APS Annual Gaseous Electronics Meeting Abstracts, DT21. 006, 2021
2021
The role of electron-induced secondary electrons in low-pressure capacitively coupled oxygen plasmas
B Horvath, A Derzsi, Z Donko, J Schulze
APS Annual Gaseous Electronics Meeting Abstracts, RW2. 015, 2020
2020
Sensitivity analysis of PIC/MCC simulation results on the parameters of a realistic model for electron-surface interaction in low-pressure capacitively coupled radio-frequency …
A Derzsi, B Horváth, P Hartmann, Z Donkó, D Schulenberg, I Korolov, ...
APS Annual Gaseous Electronics Meeting Abstracts, LT2. 021, 2020
2020
Computationally assisted in-situ measurement of secondary electron emission coefficients in CCPs
B Horvath
APS Annual Gaseous Electronics Meeting Abstracts, DM3. 003, 2020
2020
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