Capacitive micromachined ultrasonic transducer and manufacturing method DF Lemmerhirt, CA Rich
US Patent 7,888,709, 2011
140 2011 Capacitive micromachined ultrasonic transducer DF Lemmerhirt, CA Rich
US Patent 8,309,428, 2012
137 2012 Capacitive micromachined ultrasonic transducer DF Lemmerhirt, CA Rich
US Patent 8,658,453, 2014
90 2014 System and method for biasing CMUT elements DF Lemmerhirt
US Patent 8,315,125, 2012
84 2012 Capacitive micromachined ultrasonic transducer and manufacturing method DF Lemmerhirt, CA Rich
US Patent 8,399,278, 2013
75 2013 Method for electrically and mechanically connecting microstructures using solder DF Lemmerhirt, KD Wise
US Patent 6,893,885, 2005
61 2005 Modeling and characterization of CMOS-fabricated capacitive micromachined ultrasound transducers CB Doody, X Cheng, CA Rich, DF Lemmerhirt, RD White
Journal of Microelectromechanical Systems 20 (1), 104-118, 2010
55 2010 Chip-scale integration of data-gathering microsystems DF Lemmerhirt, KD Wise
Proceedings of the IEEE 94 (6), 1138-1159, 2006
42 2006 System and Method for Unattended Monitoring of Blood Flow D Lemmerhirt, X Cheng, WF Weitzel, GH Kruger, CA Rich
US Patent App. 13/655,191, 2013
41 2013 A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS DF Lemmerhirt, X Cheng, RD White, CA Rich, M Zhang, JB Fowlkes, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012
37 2012 Integrated circuit for an ultrasound system D Lemmerhirt, C Rich, S Martin, J Schox
US Patent App. 11/229,197, 2006
31 2006 CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics X Cheng, DF Lemmerhirt, OD Kripfgans, M Zhang, C Yang, CA Rich, ...
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
24 2009 A multitransducer microsystem for insect monitoring and control DF Lemmerhirt, EM Staudacher, KD Wise
IEEE Transactions on Biomedical Engineering 53 (10), 2084-2091, 2006
23 2006 Air-isolated through-wafer interconnects for microsystem applications DF Lemmerhirt, KD Wise
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
16 2003 CMUT-in-CMOS 2D arrays with advanced multiplexing and time-gain control DF Lemmerhirt, A Borna, S Alvar, CA Rich, OD Kripfgans
2014 IEEE International Ultrasonics Symposium, 582-586, 2014
13 2014 Method and system for measuring blood pressure using ultrasound by emitting push pulse to a blood vessel CA Rich, D Lemmerhirt
US Patent 11,147,531, 2021
9 2021 Field-operable microconnections using automatically-triggered localized solder-bonding DF Lemmerhirt, KD Wise
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE …, 2002
9 2002 Effects of alloy ambient on PdGe contacts on -type GaAs DA Ahmari, ML Hattendorf, DF Lemmerhirt, Q Yang, QJ Hartmann, ...
Applied physics letters 72 (26), 3479-3481, 1998
8 1998 Ultrasound System and Method of Manufacture CA Rich, DF Lemmerhirt
US Patent App. 13/854,824, 2013
6 2013 A fully-populated 32× 32 CMUT-in-CMOS array DF Lemmerhirt, X Cheng, OD Kripfgans, M Zhang, JB Fowlkes
2010 IEEE International Ultrasonics Symposium, 559-562, 2010
6 2010