Dr. Farrokh Ayazi
Dr. Farrokh Ayazi
Director, Center for MEMS and Microsystems Technologies, Georgia Institute of Technology
Verified email at gatech.edu
Title
Cited by
Cited by
Year
Micromachined inertial sensors
N Yazdi, F Ayazi, K Najafi
Proceedings of the IEEE 86 (8), 1640-1659, 1998
25231998
A HARPSS polysilicon vibrating ring gyroscope
F Ayazi, K Najafi
Journal of microelectromechanical systems 10 (2), 169-179, 2001
4442001
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
Z Hao, A Erbil, F Ayazi
Sensors and Actuators A: Physical 109 (1-2), 156-164, 2003
4422003
Process and temperature compensation in a 7-MHz CMOS clock oscillator
K Sundaresan, PE Allen, F Ayazi
IEEE Journal of Solid-State Circuits 41 (2), 433-442, 2006
2802006
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 12 (4), 487-496, 2003
2232003
High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology
F Ayazi, K Najafi
Journal of Microelectromechanical Systems 9 (3), 288-294, 2000
2192000
Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications
R Abdolvand, HM Lavasani, GK Ho, F Ayazi
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008
2112008
A 2.5-V 14-bit/spl Sigma//spl Delta/CMOS SOI capacitive accelerometer
BV Amini, F Ayazi
IEEE Journal of Solid-State Circuits 39 (12), 2467-2476, 2004
2062004
Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators
GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi
Journal of microelectromechanical systems 17 (2), 512-520, 2008
1892008
A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability
MF Zaman, A Sharma, Z Hao, F Ayazi
Journal of Microelectromechanical systems 17 (6), 1526-1536, 2008
1812008
Effect of phonon interactions on limiting the fQ product of micromechanical resonators
R Tabrizian, M Rais-Zadeh, F Ayazi
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
1802009
Piezoelectric on semiconductor-on-insulator microelectromechanical resonators
F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad
US Patent 6,909,221, 2005
1612005
An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon
R Abdolvand, F Ayazi
Sensors and Actuators A: Physical 144 (1), 109-116, 2008
1592008
VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization
S Pourkamali, Z Hao, F Ayazi
Journal of Microelectromechanical Systems 13 (6), 1054-1062, 2004
1572004
A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer
BV Amini, R Abdolvand, F Ayazi
IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006
1482006
A Sub-0.2hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching
A Sharma, MF Zaman, F Ayazi
IEEE Journal of Solid-State Circuits 44 (5), 1593-1608, 2009
1472009
A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes
A Sharma, MF Zaman, F Ayazi
IEEE Journal of Solid-State Circuits 42 (8), 1790-1802, 2007
1392007
High performance matched-mode tuning fork gyroscope
MF Zaman, A Sharma, F Ayazi
Proc. IEEE MEMS, 66-69, 2006
1382006
Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass
R Abdolvand, BV Amini, F Ayazi
Journal of microelectromechanical systems 16 (5), 1036-1043, 2007
1372007
Design and fabrication of high-performance polysilicon vibrating ring gyroscope
F Ayazi, K Najafi
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro …, 1998
1361998
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Articles 1–20