| Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges L Wang, DQ Wen, P Hartmann, Z Donkó, A Derzsi, XF Wang, YH Song, ... Plasma Sources Science and Technology 29 (10), 105004, 2020 | 33 | 2020 |
| Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ... Plasma Sources Science and Technology 29 (7), 075014, 2020 | 27 | 2020 |
| 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms L Wang, P Hartmann, Z Donko, YH Song, J Schulze Plasma Sources Science and Technology 30 (5), 054001, 2021 | 21 | 2021 |
| Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges L Wang, DQ Wen, QZ Zhang, YH Song, YR Zhang, YN Wang Plasma Sources Science and Technology 28 (5), 055007, 2019 | 21 | 2019 |
| Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch … P Hartmann, L Wang, K Nösges, B Berger, S Wilczek, RP Brinkmann, ... Journal of Physics D: Applied Physics 54 (25), 255202, 2021 | 20 | 2021 |
| 2D Particle-in-Cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas L Wang, P Hartmann, Z Donkó, YH Song, J Schulze Plasma Sources Science and Technology 30 (8), 085011, 2021 | 17 | 2021 |
| Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges L Wang, P Hartmann, Z Donkó, YH Song, J Schulze Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 39 (6 …, 2021 | 15 | 2021 |
| Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges L Wang, M Vass, Z Donkó, P Hartmann, A Derzsi, YH Song, J Schulze Plasma Sources Science and Technology 30 (10), 10LT01, 2021 | 11 | 2021 |
| Electropositive core in electronegative magnetized capacitive radio frequency plasmas L Wang, M Vass, Z Donkó, P Hartmann, A Derzsi, YH Song, J Schulze Plasma Sources Science and Technology 31 (6), 06LT01, 2022 | 4 | 2022 |
| Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis M Vass, L Wang, S Wilczek, T Lafleur, RP Brinkmann, Z Donkó, J Schulze Plasma Sources Science and Technology 31 (11), 115004, 2022 | 3 | 2022 |
| Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges L Wang, P Hartmann, Z Donkó, YH Song, J Schulze Plasma Sources Science and Technology 32 (4), 045002, 2023 | 1 | 2023 |
| On the validity of the classical plasma conductivity in capacitive RF discharges L Wang, M Vass, T Lafleur, Z Donkó, YH Song, J Schulze Plasma Sources Science and Technology 31 (10), 105013, 2022 | 1 | 2022 |
